Beijing Technol Science Co., Ltd.

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Coating Machine------TGP series multi-arc plasma coating equipment

Product Details:

Type Coating machine
Place of Origin Beijing, China
Brand Name TECHNOL

Detailed Product Description


Coating Machine------TGP series multi-arc plasma coating equipment is reliable and stable operation of vacuum level, coating can be in the smaller current work. improved coating quality. The arc source also has a high rate, usually ranging from 60% to 80%, even 100%. Moreover, by high energy ion plating, film density, strength and durability. Produce atomic diffusion coating and substrate interface, good adhesion of the film. High sedimentation rate, the TiN film can be achieved 10-1000nm/s. Decorative coating applied to the titanium nitride films such as : gold, black titanium carbide, titanium dioxide Smoke N, Corrosion also plating film (Al, Cr, stainless steel and TiN), and wear film coating and the substrate and firm also suitable for watches, hardware, tableware and wear requirements of superhard cutting tool, die, the life expectancy and improve workpiece machining accuracy. Have good prospects for development .

Type

TGP-650

TGP-800

TGP-1000

TGP1200

Coating method

Multi-arc ion coating + Magnetron sputtering + Evaporation

Four-target multi-arc ion coating + two 500×80 mm rectangular magnetic-controlled targets for magnetron sputtering coating

Eight-target multi-arc ion coating + two 700×100 mm rectangular magnetic-controlled targets for magnetron sputtering coating

Ten- to twelve-target multi-arc ion coating + two 800×100 mm rectangular magnetic-controlled targets for magnetron sputtering coating

Dimension of the chamber

Φ650×H600 mm

Φ800×H900 mm

Φ1000×H1200 mm

Φ1200×H1500 mm

Film types

Metal films, Semiconductor films, Reaction films, Dielectric films, Multi-layer? horniness films, Decorate films, Wearable films, Antisepsis films, etc.

Power supply

pulse power supply, multi-arc power supply, Minus bias, evaporation power supply

multi-arc power supply, Minus bias ?power supply, middle-frequency power supply

multi-arc power supply, Minus bias power supply, middle-frequency power supply

multi-arc power supply, Minus bias ?power supply, middle-frequency power supply

Gas flow control

optional

Vacuum chamber

Pre-open vertical structures, Postposition pumping systems

Vacuum pumps

Molecular pump / Diffusion pump + Roots pump + Mechanical pump

Highest attained vacuum

6. 6×10-5 Pa

Pumping speed

Pumping time≤20 min, from atmospheric pressure to 10-3Pa

Film uniformity

The fluctuations of the film thickness are less than 5%

Structure of the sputtering target

Multi-arc targets, Rectangular magnetic-controlled targets

Baking temperature of the workpiece

Adjustable and controllable from room temperature to 300 °C (PID Temperature Control), Radiation heating

Movement of the workpiece

Revolution / Rotation, 0-20 rpm stepless speed change, Adjustable and controllable

Vacuum measurement

Digital composite vacuum gauges, Vacuum measurement ranging from atmospheric pressure to 10-5Pa

Vacuum control

Available Manual/PLC/PLC+HMI/PC Control (optional)

Protection

Alarm and automatic protection function for water depletion, abnormal flow, over current flowing, over voltage, and electrical shutdown, etc.

Basic parameters

Power≥40 KW; Served area: 10-15 m2; Weight:5005000 kg

Optional devices

Water cooling & recycling machine, Anti-sputtering cleaning

Coating Machine------TGP series multi-arc plasma coating equipment Coating Machine------TGP series multi-arc plasma coating equipment

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Company Info

Beijing Technol Science Co., Ltd.
[China]
[Verified Member]

Business Type:Manufacturer, Trading Company, Buying Office, Agent, Distributor/Wholesaler, Government ministry/Bureau/Commission, Association, Business Service (Transportation, finance, travel, Ads, etc), Other

City: beijing
Province/State: Beijing
Country/Region : China

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