Appellation

JGMR ultrahigh vacuum transmitters Series

High vacuum chamber

Φ200mm×L300mm

Ultrahigh vacuum chamber

Φ200mm×L450mm

Electrode structure

Cathode, the anode set

magnetic transmission pole

Φ25mm×L1100mm

Base pressure (high vacuum chamber.)

8×10^-5Pa

Base pressure (Ultimate vacuum chamber.)

8×10^-8Pa

Vacuum chamber structure

Molecular pump +  condensate pump + mechanical pumps

Pumping speed

less than or equal to 20min from the air to 10^-3Pa

Vacuum control

Manual /Automatic Control

gas control

3 sets of gas control system, gas flow control 5L/3L/2L accuracy ± 0.1sccm.

protection

Equipment is being driven, under compaction, flow, over-voltage protection devices

Basic technical parameters

power≥20KW,area6m²

Option devices

Quartz oscillator thickness devices Hall ion source, and the circulating water machines pump, PLC, PC control, the anti-laundering sputtering