Vacuum Machine---TGP series multi-arc plasma coating equipment
Product Details:
| Type | Coating machine |
|---|---|
| Place of Origin | Beijing, China |
| Brand Name | TECHNOL |
Detailed Product Description
Vacuum Machine----TGP series multi-arc plasma coating equipment is reliable and stable operation of vacuum level, coating can be in the smaller current work. improved coating quality. The arc source also has a high rate, usually ranging from 60% to 80%, even 100%. Moreover, by high energy ion plating, film density, strength and durability. Produce atomic diffusion coating and substrate interface, good adhesion of the film. High sedimentation rate, the TiN film can be achieved 10-1000nm/s. Decorative coating applied to the titanium nitride films such as : gold, black titanium carbide, titanium dioxide Smoke N, Corrosion also plating film (Al, Cr, stainless steel and TiN), and wear film coating and the substrate and firm also suitable for watches, hardware, tableware and wear requirements of superhard cutting tool, die, the life expectancy and improve workpiece machining accuracy. Have good prospects for development .
Type | TGP-650 | TGP-800 | TGP-1000 | TGP1200 |
Coating method | Multi-arc ion coating + Magnetron sputtering + Evaporation | Four-target multi-arc ion coating + two 500×80 mm rectangular magnetic-controlled targets for magnetron sputtering coating | Eight-target multi-arc ion coating + two 700×100 mm rectangular magnetic-controlled targets for magnetron sputtering coating | Ten- to twelve-target multi-arc ion coating + two 800×100 mm rectangular magnetic-controlled targets for magnetron sputtering coating |
Dimension of the chamber | Φ650×H600 mm | Φ800×H900 mm | Φ1000×H1200 mm | Φ1200×H1500 mm |
Film types | Metal films, Semiconductor films, Reaction films, Dielectric films, Multi-layer? horniness films, Decorate films, Wearable films, Antisepsis films, etc. | |||
Power supply | pulse power supply, multi-arc power supply, Minus bias, evaporation power supply | multi-arc power supply, Minus bias ?power supply, middle-frequency power supply | multi-arc power supply, Minus bias power supply, middle-frequency power supply | multi-arc power supply, Minus bias ?power supply, middle-frequency power supply |
Gas flow control | optional | |||
Vacuum chamber | Pre-open vertical structures, Postposition pumping systems | |||
Vacuum pumps | Molecular pump / Diffusion pump + Roots pump + Mechanical pump | |||
Highest attained vacuum | 6. 6×10-5 Pa | |||
Pumping speed | Pumping time≤20 min, from atmospheric pressure to 10-3Pa | |||
Film uniformity | The fluctuations of the film thickness are less than 5% | |||
Structure of the sputtering target | Multi-arc targets, Rectangular magnetic-controlled targets | |||
Baking temperature of the workpiece | Adjustable and controllable from room temperature to 300 °C (PID Temperature Control), Radiation heating | |||
Movement of the workpiece | Revolution / Rotation, 0-20 rpm stepless speed change, Adjustable and controllable | |||
Vacuum measurement | Digital composite vacuum gauges, Vacuum measurement ranging from atmospheric pressure to 10-5Pa | |||
Vacuum control | Available Manual/PLC/PLC+HMI/PC Control (optional) | |||
Protection | Alarm and automatic protection function for water depletion, abnormal flow, over current flowing, over voltage, and electrical shutdown, etc. | |||
Basic parameters | Power≥40 KW; Served area: 10-15 m2; Weight:5005000 kg | |||
Optional devices | Water cooling & recycling machine, Anti-sputtering cleaning | |||
Vacuum Machine---TGP series multi-arc plasma coating equipment
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Company Info
Beijing Technol Science Co., Ltd.
[China]
[Verified Member]
City: Beijing
Province/State: Beijing
Country/Region : China
Business Type:Manufacturer, Trading Company, Buying Office, Agent, Distributor/Wholesaler, Government ministry/Bureau/Commission, Association, Business Service (Transportation, finance, travel, Ads, etc), Other
Online Postings: Products