type

VTHK450

Vacuum system components

Molecular pump and Mechanical pumps

Vacuum chamber

450×H600,Double stainless steel water cooling

Base pressure

8.0×10^-5Pa

Electric power

5000W

Heating temperature

800

Vacuum measurement

One high and one low number of significant composite vacuum gauge

Control

Manual / Automatic Control

protection

Equipment is being driven, undercompaction, flow, over-voltage Electrical interconnection lock protection devices.

Main technical parameters

1)       Base pressure        ≤2×10^-4Pa

2)       Vacuum extraction recovery time1×105Pa to 1.0×10^-3Pa  ≤ 30min.

3)       the ventilation rate        600L/s       

4)       leak rate          ≤5X10^-8PaL/s

5)       furnace Size        φ300mm

6)       heating uniformity area      φ100mm×100mm

7)       heating power        ≤5kW

8)       heating temperature       800

9)       total power          ≤7kW    

10)    water protection        Equipment in a state of suspension will automatically cut power to protect the vacuum system

Option devices

Cooling water recycling machine