Type

ZHD230 A

ZHD230 B

ZHD230 C

Vacuum pumps

Diffusion pump + Mechanical pump

Molecular pump + Mechanical pump

Diffusion pump + Mechanical pump

Highest attained vacuum

6. 6 ×10-4Pa

6. 6 ×10-5 Pa

6. 6 ×10-4 Pa

Power supply

2 KW

Structure of the electrodes

A pair of evaporation electrodes

A pair of evaporation electrodes

A pair of evaporation electrodes, A suit of carbon-spraying equipment

Film types

Metal films, Oxide films, Dielectric films, Semiconductor films, organic films, etc.

Evaporation electrodes

a pair of water-cooling electrodes

Coating chamber

Dimension: 230×H300 mm; Material: glass cover; Top-down structure

Pumping speed

Pumping time≤20 min (Molecular pump) / 30 min (Diffusion pump), from atmospheric pressure to 10-3Pa

Film uniformity

The fluctuations of the film thickness are less than 5%

Vacuum measurement

Low-high digital composite vacuum gauge × 1, from atmospheric pressure to 10-5 Pa

Vacuum control

Manual Control

Sample support

Φ80100 mm, Locates on the top of the chamber

Protection

Alarm and automatic protection function for water depletion, abnormal flow, over current flowing, over voltage, and electrical shutdown, etc.

Basic parameters

Power≥5 KW; Served area: 5 m2

Working environment and conditions

Optional devices

Water cooling & recycling machine